Cryopump manufacturers

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ANELVA cryopumps Canon ANELVA Technix Corporation - www.canon-anelvatx.co.jp
- 2-5-1 Kurigi, Asao-ku, Kawasaki-shi, Kanagawa 215-8550, Japan

email, Tel.

Founded Date: October 1st 2003, Number of Employees: 140, Net Sales (2007): 6.1 billion JPY 		Products:   Manufacuring & sales of Vacuum Component products and Associated Systems

The cryopump can exhaust various types of gases to efficiently create a pure ultra-high vacuum. The various products available are: standard cryopump with different diameters, low horizontal cryopump, nude cryopump which does not have a pump casing so that a cryo- panel can be directly inserted into the chamber, an H-type pump that greatly increases hydrogen emissions, an R-type pump with greatly reduced regeneration time, and an X-type pump for ultra-high vacuum.
The Power Eco Series cryo pump contributes to improve the efficiency of semiconductor and electronic parts manufacturing equipment by reducing the regeneration (warm-up) time and start-up time of cryopump and by improving its exhaust performance (exhaust capacity).


Sumitomo Cryopump Sumitomo Heavy Industries, Ltd. - www.shicryogenics.com
- 1-1, Osaki 2-Chome, Shinagawa-ku, Tokyo 141-6025, Japan

email, Tel. +81-3-6737-2550

SHI Cryogenics Group, a global manufacturer that includes the Cryogenics Division of Sumitomo Heavy Industries, Ltd. and the former APD Cryogenics, delivers innovative solutions to the semiconductor, research, optical coating, and medical industries.
With offices in Japan, Europe and the United States, it has been producing quality cryogenic equipment for 50 years. SHI Cryogenics Group serves its customers with facilities around the world, while its renowned engineering departments in the United States and Japan continue to focus on the latest cryogenics technologies, including innovative cryopump and cryocooler designs. 		Products:   Design, manufacture and servicing of cryopumps

SHI Cryogenics Group invented the cryopump in the 1970s and today remains the recognized innovator of cryopumps for high and ultra-high vacuum applications. Both our Marathon® CP and SICERA™ Cryopump lines are ideally designed to handle the diverse and demanding requirements of a broad range of vacuum and deposition technologies.

SHI Cryogenics Group is proud to offer a wider range of quality cryogenic equipment than any other manufacturer, including 4K and 10K cryocoolers, cryopumps, pulse tubes, shield coolers and laboratory cryostats. This diverse product portfolio features several models and capacities to meet the unique needs of its customers in the semiconductor, research, optical coating and medical industries.


ULVAC CRYOGENICS ULVAC CRYOGENICS INC. - www.ulvac-cryo.com
- 1222-1, yabata, Chigasaki City, Kanagawa Prefecture 253-0085, Japan

email, Tel. 0467-85-0303

ULVAC Inc., Japan's world leading vacuum technology specialist, and HELIX TECHNOLOGY CORPORATION (CTI Cryogenics Division), the foremost U.S. manufacturer of CRYOPUMPS with many years of experience in Cryogenic Technology formed a joint venture company, ULVAC CRYOGENICS INC. in 1981
As a member of the ULVAC Group, ULVAC CRYOGENICS manufactures a complete line of CRYOPUMPS for the Japanese and Asia markets.
ULVAC CRYOGENICS INC. is meeting the rapidly growing demand for CRYOPUMPS and providing application engineering, complete customer service and training. 		Products:   Design, manufacture and servicing of cryopumps




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