Canon ANELVA Technix Corporation - 2-5-1 Kurigi, Asao-ku, Kawasaki-shi, Kanagawa 215-8550, Japan
E-mail, Tel. Fax
products:
The Excel pump makes XHV possible:
The excel pump is a small, light pump developed on the basis of an ion pump.
It incorporates a newly developed excel device which has improved discharge characteristics
in the low pressure area, a built-in baking heater, and a built-in NEG (non-evaporation getter) pump.
ion pump / noble pump: they utilize the gas adsorption properties of the cathode material sputtered by the cold cathode discharge.
The ion pump creates a completely oil-free vacuum. The triode noble pump with improved performance for exhausting inactive gas is also available.
combination pump: A noble pump is combined with a titanium sublimation pump or a tie-back pump. This oil-free pump has a high exhaust velocity equivalent to that of an oil diffusion pump.
company profile:
Manufacuring & sales of Vacuum Component products and Associated Systems
Founded Date: October 1st 2003, Number of Employees: 140, Net Sales (2007): 6.1 billion JPY
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