| Turbomolecular vacuum pump
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Shimadzu - Kratos - www.kratosvacuum.co.uk - Wharfside, Trafford Wharf Road, M17 1GP Manchester, United Kingdom
Dr. David C. Dingley, business manager, E-Mail: vacuum@kratos.co.uk, Tel. +44 161 888 4400 x225, Fax +44 161 888 4402
products:
Magnetically levitated turbo molecular pumps from 200 L/s to 4200 L/s.
for use on semiconductor, glass coating and scientific instrument use: Etch, implant, CVD, HDPCVD, LPCVD, display coating, glass coating & imaging applications
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BOC Edwards - Manor Royal, Crawley RH10 2LW, United Kingdom
W-Mail, Tel. Fax
products:
BOC Edwards turbomolecular pumps are multistage axial flow turbines capable of achieving high to ultra-high vacuum levels. Our turbo pumps are compact and lightweight with very high rotational speeds and produce an ultimate vacuum down to 5 x 10-10 torr.
BOC Edwards produces two ranges of turbomolecular pumps, the STP and EXT. The main difference is that the STP range use electro-magnetic rotor bearings and are most appropriate for semiconductor applications such as plasma etch, film deposition, sputtering, ion implantation, wafer inspection, load locks and R&D. The EXT series use ceramic rotor bearings and are primarily used in the scientific applications such as mass spectrometry, surface analysis, electron microscopy, high energy physics and R&D.
company profile:
BOC Edwards is the world leader in vacuum technology for semiconductor,
industrial and scientific applications. The company is engaged in the development, manufacture and support of a wide range of vacuum pumps, systems, boosters and accessories based on a number of technologies and capable of achieving high vacuums down to 10-7 mbar.
BOC Edwards pioneered the oil-free dry pump, originally for the semiconductor industry
and now markets a series of dry pumps using claw,
roots,
scroll and combined mechanisms.
Other pumping technologies include rotary vane, vapour diffusion,
cryogenic and sputter-ion.
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related pages:
cryopumps,
diffusion pumps,
getter ion pumps,
turbomolecular pumps,
vacuum oil and sealants
Keywords
www.vacuum-guide.com
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