Film thickness monitoring

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ColnaTec Thin Film Measurement ColnaTec, LLC - www.colnatec.com
- 511 W. Guadalupe Road, Suite 23, Gilbert, AZ 85233 USA

email, Tel. +1 480-634-1449

At Colnatec, we work exclusively with manufacturing process control sensors for thin film measurement in areas as diverse as solar cell manufacturing (CIGS), food packaging (R2R), mobile display (OLED), Optical Coatings (ALD), high speed electrical devices (MBE), architectural glass (In-Line) and semiconductor wafer processing (CVD).
Colnatec holds eight (8) patents, and we are recipients of a Department of Energy SBIR award for a revolutionary process control sensor to be used in manufacturing CIGS solar cells.
Products:   thin film measurement

Quartz Crystal Sensors
Sensor Heads
Film Thickness Controller


INFICON Thin Film Deposition Controllers, XTM/2 Thin Film Monitor INFICON - www.inficon.com
- Two Technology Place, East Syracuse, New York, 13057 USA

email, Tel. +1 315 434 1100
Products:   thin film deposition controllers and monitors

INFICON market-leading thin film deposition controllers and monitors control deposition rate and thickness of the most complex processes with unsurpassed measurement speed and precision. Enhanced software and logic I/O features allow the INFICON Thin Film Deposition Controller to be fully integrated into the vacuum system for automatic process control. To control less complex processes, use INFICON economical, precision controllers and monitors that measure films with 100 times more precision than conventional techniques.
All INFICON crystal-based instruments use our patented measurement system, ModeLock, making them the most advanced instruments available.
INFICON superior quartz crystals offer the highest reliability for millions of successful process runs. Available in 5 or 6 MHz with gold or silver electrodes, INFICON crystals are 100% factory tested to ensure quality.


Sigma Instruments QCM (quartz crystal microbalance) monitors and controllers Sigma Instruments - www.sig-inst.com
- 120 Commerce Drive Unit 1, Fort Collins, CO 80524, USA

email, Tel.

Founded in 1995, Sigma Instruments has grown to become a leading manufacturer of instrumentation for measurement and control of thin film processes.
Products:   measurement and control of thin film processes

Q-pod QCM Deposition Rate/Thickness Transducer,
SQM-160 Multi-Film Rate/Thickness Monitor,
SQC-300 Series Deposition Controllers,
SQM-242 PCI Card Co-Deposition Controller,
CI-100 Crucible Indexer
Our QCM (quartz crystal microbalance) monitors and controllers are well known for their beautiful color graphic displays and intuitive easy-to-use setup and operation. Our product line includes a broad range of accessories to complete your system and we can customize hardware and/or software to meet your needs.


TANGIDYNE Film Thickness Sensors and Monitoring Tangidyne Corp. - www.tangidyne.us
- 2327 North Pleasantburg Drive, Greenville, SC 29609, USA
Scott Grimshaw, email, Tel. +1 864-239-6608

Tangidyne Corp was established in 2001 by Scott Grimshaw, inventor of the RC-Quartz Crystal and Alloy Quartz Crystal monitor. Tangidyne has 5 patents in quartz crystal film thickness technology and makes stock items as well as custom sensors for research.
Products:   Quartz Crystals for Inficon Film Thickness Monitors

Tangidyne designs and manufactures quartz and high temperature (gallium phosphate, langasite and langatite) film thickness sensors and hardware (also called QCM's, or Quartz Crystal Microbalances) for use in vacuum deposition systems (thermal, electron beam, sputtering, MBE, CVD, CIGS, OLED and ALD processes) and liquid monitoring technology.




    Keywords     www.vacuum-guide.com





In situ monitoring parameters are indispensable for thin film fabrication. Among them, thickness and deposition rate control are often the most important in achieving the reproducibility necessary for technological exploitation of physical phenomena dependent on film microstructure.