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ADVANCED ENERGY INDUSTRIES, INC. - www.advanced-energy.com
- 1625 Sharp Point Drive, Fort Collins, CO 80525, USA
email, Tel. 800 446 9167
AE focuses on high-growth applications, including solar cell, passive-solar architectural glass, solar grid-tie inverter,
semiconductor, flat panel display, data storage, and other advanced processes.
AE's product portfolio includes precise, flexible electrical power systems, reliable gas and liquid flow-management systems,
accurate thermal instruments, and global support services.
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Products: Flow management
Thermal-based Mass Flow Controllers
Thermal-based Mass Flow Meters
Pressure-Based Mass Flow Controllers
LIQUID Mass Flow Controllers
ROD4-A Mass Flow Control Unit
Exhaust Pressure Controllers
Material Delivery Systems
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Alicat Scientific, Incorporated - www.alicatscientific.com
- 7641 N. Business Park Drive, Tucson, AZ 85743, USA
email, Tel. (888) 290 6060
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Products: Mass flow meters, mass flow controllers
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Apex Vacuum - www.apexvacuum.com
- 222 Riverstone Drive, Canton, GA 30114, USA
email, Tel. 770-479-7158
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Products: Mass Flow Controllers and Meters, Battery Powered Mass Flow Meter
Power Supply and communication Cables, FlowVision Software for MFC/MFM
Pressure Controllers, Vacuum/Pressure Gauges
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Sierra Instruments, Inc. - www.sierrainstruments.com
- 5 Harris Court Building L, Monterey, CA 93940, USA
email, Tel. +1 831-373-0200
Founded in 1971 by Dr. John G. Olin, Sierra has long been well known as a manufacturer of high-performance fluid flow measurement
and control instrumentation for use in numerous industries and applications throughout the world.
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Products: Smart-Trak 2® + Compod™
Maintaining a specified gas mass flow rate to the vacuum chamber is critical during the PVD process.
Typically, vacuum pumping stations require a throttle valve or orifice-limiting device to control the pump's output
when the PVD gas is introduced. This method is extremely pressure sensitive and can result in inefficient gas delivery
and poor product quality. Sierra's Smart-Trak 2 with Compod automatically compensates for changes in system pressure
(vacuum pump fluctuations) or loss of pressure from the gas source (cylinder depletion). The Smart-Trak® 2 with Compod™
also delivers precisely controlled gas mass flow rate to the vacuum chamber to maintain high quality end-product.
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www.vacuum-guide.com
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