Mass flow meters & controllers

    leak detector    residual gas analysis     vacuum measurement    vacuum components   

Mass flow meter        Mass flow controler

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ADVANCED ENERGY INDUSTRIES ADVANCED ENERGY INDUSTRIES, INC. - www.advanced-energy.com
- 1625 Sharp Point Drive, Fort Collins, CO 80525, USA

email, Tel. 800 446 9167

AE focuses on high-growth applications, including solar cell, passive-solar architectural glass, solar grid-tie inverter, semiconductor, flat panel display, data storage, and other advanced processes.
AE's product portfolio includes precise, flexible electrical power systems, reliable gas and liquid flow-management systems, accurate thermal instruments, and global support services.
products:   Flow management

Thermal-based Mass Flow Controllers
Thermal-based Mass Flow Meters
Pressure-Based Mass Flow Controllers
LIQUID Mass Flow Controllers
ROD4-A Mass Flow Control Unit
Exhaust Pressure Controllers
Material Delivery Systems


Mass flow meter Alicat Scientific, Incorporated - www.alicat.com
- 7641 N. Business Park Drive, Tucson, AZ 85743, USA

email, Tel. (888) 290 6060

Founded: 1991, Tucson, Arizona ; Acquired: 2010 by Halma plc
More than 100,000 Alicat mass flow and pressure instruments are in operation around the world.
products:   Pressure controllers and mass flow controllers for vacuum coating

Fast, responsive gas delivery for PVD and ALD processes

Delivery of purge and reactive gases into a vacuum coating system requires fast response and precise control. These innovatively reliable, versatile products are superior to original equipment, in a competitively-priced package.


APEX Mass flow meter Apex Vacuum - www.apexvacuum.com
- 222 Riverstone Drive, Canton, GA 30114, USA

email, Tel. 770-479-7158
products:   Mass Flow Controllers and Meters, Battery Powered Mass Flow Meter

Power Supply and communication Cables, FlowVision Software for MFC/MFM
Pressure Controllers, Vacuum/Pressure Gauges


Brooks Instrument Brooks Instrument - www.brooksinstrument.com
- 407 West Vine Street, Hatfield, PA 19440-0903 USA

email: BrooksAM@BrooksInstrument.com, Tel. 888-554-FLOW

World's largest installed base of mass flow controllers; one of the most trusted suppliers of mass flow technology to the global semiconductor industry. Brooks holds over 150 active patents, so our product portfolio incorporates multiple patented advances in fundamental fluid measurement and control technology.
products:   Metal Sealed Thermal Mass Flow Controllers & Meters

Highest-purity flow path. Ultra-precise, contaminant-free control.

Many of today’s advanced electronic device fabrication processes require extremely accurate and highly repeatable measurement and control of expensive ultra-pure gases and liquid precursors.
Brooks Instrument meets those needs with our game-changing metal sealed thermal mass flow controllers and meters. Precise chemistry control is achieved through the combination of ultra-stable, highly accurate measurement sensors, fast precision control valves and powerful digital electronics. Purity of the process chemistry is ensured by our high-integrity (leak tight), ultra-high purity, all-metal wetted flow path, designed to keep outside contaminants like moisture and oxygen from corrupting the process media.


Sierra Instruments Mass flow meter Sierra Instruments, Inc. - www.sierrainstruments.com
- 5 Harris Court Building L, Monterey, CA 93940, USA

email, Tel. +1 831-373-0200

Founded in 1971 by Dr. John G. Olin, Sierra has long been well known as a manufacturer of high-performance fluid flow measurement and control instrumentation for use in numerous industries and applications throughout the world.
products:   Smart-Trak 2® + Compod™

Maintaining a specified gas mass flow rate to the vacuum cham­ber is critical during the PVD process. Typically, vacuum pumping stations require a throttle valve or orifice-limiting device to control the pump's output when the PVD gas is introduced. This method is extremely pressure sensitive and can result in inefficient gas delivery and poor product quality. Sierra's Smart-Trak 2 with Compod automatically com­pensates for changes in system pressure (vacuum pump fluc­tuations) or loss of pressure from the gas source (cylinder depletion). The Smart-Trak® 2 with Compod™ also delivers pre­cisely controlled gas mass flow rate to the vacuum chamber to maintain high quality end-product.




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