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VACOM Vakuum Komponenten & Messtechnik GmbH - www.vacom.de - Gabelsbergerstraße 9, 07749 Jena, Germany
E-Mail: info@vacom.de, Tel. +49 (3641) 4275-0, Fax +49 (3641) 4275-24 products: Drehdurchführungen mit Magnetofluid-Dichtung, Drehdurchführungen mit magnetischem Antrieb, Manipulatorkomponenten, Heizer und Manipulatoren für die Waferbeschichtung, Transferstangen, Ersatzteile. |
MEWASA FLEX GmbH - www.mewasaflex.de - Kirchweg 3, 34317 Habichtswald, Deutschland
Kurt Boden, E-Mail: info@mewasaflex.de, Tel. +49 (5606) 563 174 , Fax +49 (5606) 563 175 products: Manipulators company profile: MEWASA FLEX GmbH ist die Vertriebsorganisation der MEWASA AG (CH). In Zusammenarbeit mit Partnerfirmen wird eine vielfältige Produktpalette für die Vakuumtechnik hergestellt. |
Caburn-MDC Europe Limited - www.caburn.co.uk - Factory Q, Menzies Road, Ponswood Industrial Estate, St. Leonards-on-Sea, East Sussex TN38 9BB, United Kingdom
Peter Davenport, E-Mail: sales@caburn.co.uk, Tel. +44 870 428 7646, Fax +44 870 428 7647 products: manipulators company profile: Caburn-MDC Europe, together with MDC and ISI, aims to provide the most complete range of high- and ultra-high vacuum components to the European scientific community. From basic flanges to innovative valves, feedthroughs and deposition equipment, our comprehensive online catalogue can provide you with details on a wide range of standard products, all fully specified and priced online. Many of our products are available for rapid delivery. |
UHV manipulators
An UHV manipulator allows to position, rotate, heat, and cool a sample.
It allows to measure the temperature and to apply a specific voltage and magnetic field. Due to the UHV requirements some movements are transferred by bellows into vacuum. Bellows do not allow rotation, but then a typical manipulator is a pole supported outside vacuum to position the sample and has a U-joint at the end to rotate the sample. The U-joint itself gets quite hot and is driven remotely by small bellows, by magnets reaching through thin aluminum, by an electric motor, or by a piezoelectric drive. Any cables and tubes running to the sample run in helix or spiral fashion to bend, when the sample is rotated. In this way nearly 360° rotation is possible. Due to the U-joint consisting of three rotation joints three helices are needed. One of them goes up the whole pole so has lot of space to distribute the bend across, but may need regular support to stay close to the axis. The cooling tubes do not bend quite as well as conductive copper cooling wire, so along the pole the tube is used and a wire is used for the two other joints. Each joint is made of two ball bearings with hard sapphire balls running in steel grooves so that they do not need a lubricate. Cables are isolated by means of glass fibers and/or are held clear by means of ceramic spacers. The sample is electrically connected to thermocouple wire, which also allows to send current through the sample and apply a voltage. The tubes for the cooling liquid can theoretically feed out of the vacuum through some electrical feed through, so that they can also be used to apply a potential or current to the sample. Behind the sample - with nothing obstructing the view – is a thoriated wolfram coil. A current allows it to glow and radiatively heat the sample. At higher temperatures it additionally emits hot electrons. When a voltage is applied to the sample it can be heated effectively by impact of these electrons. Two coaxial coils can compensate the magnetic field of each other or enhance it.
related pages: bellows, chambers, electrical feedthroughs, flanges, gauges, manipulators, mechanical electrical feedthroughs, valves, viewports,
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