JAPAN Ion Getter Pumps manufacturers Keywords www.vacuum-guide.com

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JAPAN


Canon ANELVA cryopumps Canon ANELVA Technix Corporation - www.canon-anelvatx.co.jp
2-5-1 Kurigi, Asao-ku, Kawasaki-shi, Kanagawa 215-8550, Japan

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Manufacuring & sales of Vacuum Component products and Associated Systems
Founded Date: October 1st 2003, Number of Employees: 140, Net Sales (2007): 6.1 billion JPY
products: The Excel pump makes XHV possible:

The excel pump is a small, light pump developed on the basis of an ion pump. It incorporates a newly developed excel device which has improved discharge characteristics in the low pressure area, a built-in baking heater, and a built-in NEG (non-evaporation getter) pump.

ion pump / noble pump: they utilize the gas adsorption properties of the cathode material sputtered by the cold cathode discharge. The ion pump creates a completely oil-free vacuum. The triode noble pump with improved performance for exhausting inactive gas is also available.
combination pump: A noble pump is combined with a titanium sublimation pump or a tie-back pump. This oil-free pump has a high exhaust velocity equivalent to that of an oil diffusion pump.


ULVAC Getter pump ULVAC, Inc. - www.
- 2500 Hagisono, Chigasaki, Kanagawa 253-8543, Japan

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Development, manufacture, sales, customer support and machinery importing/exporting activities related to vacuum equipment, peripheral devices and vacuum components for the display, Solar cell, semiconductor, electronics, electrics, metals, machinery, automotive, chemical, food and pharmaceutical industries, and for universities and research centers. Research guidance and technical consulting on all aspects of vacuum technology.
products: PGT Series Titanium Getter Pumps

ULVAC's titanium getter pumps (PGT Series) and power supplies for titanium getter pumps (GGT Series) are units for passing current directly through titanium alloy in a vacuum to sublimate it. The sublimated titanium creates a large-volume activated metal surface on the surrounding walls, and chemically activated gas is adsorbed and evacuated.

 

 

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