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Empire Magnetics vacuum rated motors Empire Magnetics, Inc. - www.empiremagnetics.com
- 5830 Commerce Blvd Rohnert Park, CA 94928, USA

email, Tel.

Empire Magnetics provides quality motor products designed to perform in environments and applications where ordinary motors are unsuitable.
products: Vacuum Rated Motors
  • VX - Laboratory Grade Vacuum Products
    The vacuum rating for this motors is 10-7 Torr. The internal temperature rating is 180o C internal and 155o for the case. The bearing lubricant vapor pressure is below 10-9 Torr at 100o C. This motor is cleaned and baked, and undergoes a proprietary extraction process to remove contaminants. It should be handled under clean room conditions with nylon gloves.
    VX grade is our premium product offering. It is typically used when even very small amounts of contamination are of concern to the customer. Some applications have been: space based optical systems, semiconductor manufacturing chambers and electron beam equipment.
  • VS - Standard Grade Vacuum Products
    These products have a vacuum rating of 10-7 Torr and temperature rating of 155o C internal and 130o for the case. The bearing lubricant vapor pressure is below 10-8 Torr at 100o C. This motor is subjected to an industrial cleaning process, vacuum baked to encourage outgassing of residual contaminants and is sealed qin a nylon bag.
    VS grade is our "standard" product offering. It is typically used when very clean is good enough. Often the VS grade is selected for vacuum chamber applications where the chamber will be opened frequently, the contamination from the outside air will normally exceed that of the VS grade equipment, so it is deemed suitable for the application.
  • VC - Commercial Grade Vacuum Products
    The Commercial Grade had a vacuum rating of 10-6 Torr. These motors are temperature rated at 130o C internal, and 105o for the case. The bearing lubricant vapor pressure is below 10-6 Torr at 100o C. This motor will give off a small quantity of vaporization products and no special handling is required.

haydonkerk Haydon Kerk Motion Solutions, Inc - www.haydonkerk.com
- 1500 Meriden Road, Waterbury, CT 06705 USA

email, Tel. +1 800 243 2715
products: Haydon™ specialty Clean Motor

Designed for contamination sensitive applications, cleanroom environments, and environments within systems under high vacuum, HaydonKerk's Clean Motors are designed to limit contaminants and out gassing in vacuum environments. Provided that the motor operates below its rated operating temperature, Haydon™ Clean Motors will survive in a vacuum down to 10-8 Torr. To ensure the minimum amount of out gas in a vacuum environment, the Clean Motor product undergoes special handling and uses parts fabricated in a proprietary process. Clean Motors are constructed of non-volatile materials, thoroughly cleaned using ultrasonic equipment, and then vacuum-baked at high temperature to extract contaminants.

Lin Engineering Lin Engineering, LLC. - www.linengineering.com
- 16245 Vineyard Blvd, Morgan Hill, CA 95037, USA

email, Tel. +1 408-919-0200

Founded by Ted T. Lin in 1987, Lin Engineering began as a consulting company specializing in step motor applications. Throughout its history, Lin Engineering has continued to develop its capabilities in the areas of design engineering, manufacturing, and customer service.
In 1991, Lin Engineering expanded its operatings to include the manufacturing of its own hybrid step motors. Since then, the company has developed its product line to include drivers, optical encoders, spur and planetary gearboxes, and step motor drives.
products: Vacuum Rated Motor

The vacuum rated stepper motors are manufactured to operate in cleanroom environments where outgassing needs to be avoided:
  • Vacuum Ratings up to 10-7 Torr at 125°C
  • Special windings and teflon leads utilized

for Semiconductor environments, Optics environments, Satellites

MadMotor UHV motor Mad City Labs Inc. - www.madcitylabs.com
- 2524 Todd Drive, Madison, WI 53713, USA

email, Tel. +1 (608) 298-0855

Mad City Labs, Inc is a leading manufacturer of flexure based nanopositioning systems capable of sub-nanometer positioning resolution. Our product line covers the entire spectrum of nanopositioning capabilities while maintaining a leadership role in multi-axis stages for high speed optical microscopy imaging.
products: MadMotor-UHV precision piezo motor

The MadMotor™-UHV is a precision, piezo motor driven, micropositioning system for high precision alignment over long travel ranges. The MadMotor™-UHV stages use our proprietary MadMotor™ piezo motor technology allowing travel up to 10mm per axis with high resolution and excellent repeatability. Optional eddy current sensors provide 500nm sensitivity over the entire travel range.

Leveraging Mad City Labs extensive experience in engineering and manufacturing ultra-high vacuum (UHV) instrumentation, the MadMotor™-UHV is vacuum compatible to 1 x 10-11 mbar. Our experienced engineering staff have carefully designed the MadMotor™-UHV stages to account for the rigorous requirements for UHV operation. Mad City Labs' practical experience with UHV instrumentation informs our choice of materials, with only the best materials that meet our practical and technical criteria making the grade. The MadMotor™-UHV stages have been designed to withstand the rigors of sample transfer that can often damage more delicate piezo motor designs. In addition, our MadMotor™-UHV stages are able to withstand extensive periods of baking with temperatures up to 150°C. As a result, the MadMotor™-UHV is a robust and reliable stage as required by UHV applications.

The MadMotor™-UHV includes the Mad-Drive™ which is a 1, 2, or 3 axis piezo motor driver with an integrated DSP and USB interface. The Mad-Drive™ can be programmed to perform complex motion functions via the MadMotor™ DLL interface (supplied). Unlike other piezo motors the MadMotor™ DLL allows the user to treat the MadMotor™-UHV as a simple stepper motor with variable step size and stepping distance. The Mad-Drive™ controller is LabVIEW compatible and the system is provided with LabVIEW motion control examples. Optional wireless joystick control is also available. The MadMotor™-UHVstages are designed for flange mount or freestanding configurations and are compatible with a variety of Mad City Labs vacuum nanopositioning systems. The MadMotor™-UHV can be customized for your application. Contact our engineering staff for more information.

Phytron Vacuum Stepper Motors Phytron Inc. - www.phytron.com
- 600 Blair Park Road, Suite 220, Williston, VT 05495, USA

email, Tel. +1 802 872-1600

Phytron was established out of these values in 1947 and has since developed into an internationally leading manufacturer in the stepper motor and control devices industry.
products: Vacuum Stepper Motors VSS / VSH: 19 - 125 mm

Phytron's VSS stepper motors are the result of more than 30 years of experience in space technology. The specially designed two phase, hybrid stepper motors can be used in vacuum environments up to 10 -11 hPa. They are optimal for extraordinary environments such as deep and high temperatures or extreme radiation intensity.

Princeton Research Instruments, Inc. - www.prileeduhv.com
- 42 Cherry Valley Road, Princeton, NJ 08542 USA

email, Tel. +1 (609) 924-0570

We manufacture scientific instruments for use in ultra-high vacuum (UHV), including reverse view Low Energy Electron Diffraction (LEED) systems, 10 kV High Energy Electron Diffraction (HEED) systems, and in-vacuum motion systems (stepper motors, positioning stages, and a motor controller).
products: In-Vacuum Motion Systems

Princeton Research Instruments, Inc. offers miniature in-vacuum stepper motors, motorized stages, and accessories that provide rotary or translation motion in high and ultra high vacuum without the use of mechanical feedthroughs. These products provide a unique, efficient alternative to the traditional mechanical feedthroughs. A full line of accessories is available including couplings, clamps, cables, electrical feedthroughs, etc.



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