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Residual Gas Analysis (Instruments and Services)

leak detector mass flow meter vacuum gauge vacuum components

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MKS Instruments Deutschland GmbH - www.mksinst.com
- Schatzbogen 43, 81829 München, Deutschland

E-Mail: mks-germany@mksinst.com, Tel. +49 (89) 420 008-0, Fax +49 (89) 424 106

company profile:
MKS Instruments is a leading worldwide provider of instruments, components, subsystems and process control solutions that measure, control, power and monitor critical parameters of advanced manufacturing processes such as semiconductor device manufacturing, thin-film manufacturing for flat panel displays, optical storage media, architectural glass and electro-optical products, biopharmaceutical manufacturing.

Products: Mass Spectrometry gas analyzer

Gas Analyzers - Mass Spectrometry: Quadrupole Mass Spectrometer, Residual Gas Analysis, Process Monitor and Process Control Products
MKS Mass Spectrometry gas analyzer products are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), web-enabled RGA's, analytical equipment, and process RGAs and control software.
For general residual gas analysis, the performance of MicroVision Plus residual gas analyzer, coupled to the wide range of configurations available, make it the ideal choice for many different residual gas analyzer applications, including ultra high vacuum (UHV), such as vacuum coatings, accelerators and high energy physics, harsh environments, such as high temperature and ionizing radiation, high performance, research and development for high mass species studies, and high resolution studies, including low molecular weight species studies and helium from Deuterium studies.

Leak Detection Service GmbH - www.lds-europe.com
- Fraunhoferstr. 11, 82152 Martinsried /Planegg, Deutschland

E-Mail: service@leak.detection-service.de, Tel. +49 89 958990-0, Fax +49 89 958990-29
Michael Kniebeler, Geschäftsführer, E-Mail: kniebeler@leak-detection-service.de

company profile:
Since beginning of 2003, LDS Leak Detection Service GmbH is professional Partner of the European Industry, Research/ Development Institutes and Public Authority if Helium-/ Air Leak Testing or Surface Measurement is the issue.
Our main focus is on German speaking Europe as well as the new Eastern European Territories.

Products: ULVAC Residual gas analyzers

Qulee (pronounced as KLEE), ULVAC's latest model for residual gas analysis and gas monitor during process, achieves measurement of high accuracy and high resolution even at a high pressure (1 Pa or less), as well as utmost simplicity in handling. Many pieces of feedback from facility engineers in various production lines are reflected in the new product.