Japan Dry vacuum pumps

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claw pumps more vacuum pumps

Asia Pacific   JAPAN KR

EBARA Corporation - www.ebara.co.jp - 11-1, Haneda Asahi-cho, Ohta-ku, Tokyo 144-8510, Japan email, Tel. EBARA is a world leader in the design and manufacture of dry mechanical pumps. EBARA dry pumps provide a host of product enhancements including increased reliability, reduced clean room particulate load, low noise, low vibration, lower operating costs, and the lowest cost of ownership. EBARA's dry pumps survive the harshest applications such as LPCVD, PECVD, CVD, and meta etch. EBARA's dry pumps are used for many applications in and outside the semiconductor industry where oil backstreaming is unacceptable. Custom designs and broad product lines make an EBARA dry pump the pump of choice.

products: Dry Vacuum Pumps PDV Series: Maintenance free - ideal replacement for scroll and wet pumps VOS Series: Highest pumping speed to footprint ratio in the industry ESR Series: Designed and manufactured to be the lowest cost of ownership pumps on the market today EST Series: Engineered for application in harsh duty processes ESA Series: Designed and manufactured to be the lowest cost of ownership pumps on the market today

Kashiyama Industries Co., Ltd. - www.kashiyama.com - 1-1 Nenei, Saku City, Nagano, 385-8511 Japan email, Tel.

products: Dry vacuum pumps Dry vacuum Pump Mechanical Booster Pump Air Discharge System

Shinko Seiki Co., Ltd. - www.shinko-seiki.com - 1-35-3-chome, Takatsukadai, Nishi-ku, Kobe 651-2271, Japan, Japan email, Tel.

products: Vacuum pumps & components Dry vacuum pumps SST/SSX series (Screw type) Dry vacuum pumps SSH series (Screw type)

Taiko Kikai Industries Co., Ltd. - www. - 209-1 Simotabuse,Tabuse-cho,Kumage-gun,Yamaguchi 742-1598, Japan email, Tel.

products: Screw type dry vacuum pumps Taiko's dry vacuum pump, provided with unique shaped screws, is one of the screw-type pumps that operate most slowly in the world. Screw type vacuum pump compresses, in one stage, the handled gas with non-contacting operation through from suction to discharge. This achieves the feature that powder and mist accompanying the handled gas are discharge efficiently. For this feature, screw type vacuum pump is widely used as a highly-reliable pump in the industries including semiconductor, liquid crystal, solar battery, pharmaceutical, chemical.

TOYOTA Industries Corporation - www. - Obu Plant, SP Sales Office, Sales Dept., Compressor Division 1-1 Ebata-cho, Obu-shi, Aichi 474-8668 Japan email, Tel. Toyota Industries Corporation manufactures and sells high quality and reliable dry vacuum pumps using the technology cultivated in the development and production of car air-conditioning compressors.

products: Dry vacuum pumps EC 100L and T Series use a multistage roots system. These dry pumps mainly used in semiconductor production equipment, have achieved best-in-class low power consumption and contributed to the reduction of electricity consumption and CO2 emissions. T100L (100m3/h down to 0,01 Torr) is an ultra compact and quiet roots dry pump for clean application. It is designed for the integration into semiconductor equipment in the cleanroom. T100P (100m3/h down to 0,01 Torr) is excellent performance dry pump for all process including light duty and harsh duty processes. It has good reliability and safety for reactive gases and deposition. T1000 (600-950m3/h down to 0,001 Torr) is designed to cover wide range of processes with its high capacity and variable pumping speed. It has good reliability and safety for reactive gases and deposition.

 

 

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