Residual Gas Analysis (Instruments and Services)

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Pfeiffer Vacuum Inc. - www.pfeiffer-vacuum.com - 24 Trafalgar Square, Nashua NH 03063-1988, USA email: info@pfeiffer-vacuum.de, Tel. +1 (800) 248-8254 Pfeiffer Vacuum is a vacuum technology world leader for more than 130 years: an important milestone was the invention of the turbopump in our company more than 50 years ago. Our comprehensive range of solutions, products and services includes vacuum pumps, measurement and analysis equipment, up to complex vacuum systems.

products: PrismaPlus™ mass spectrometer Quadrupole mass spectrometers are the classic measuring instrument for evaluating residual gas composition in a vacuum system. The ion currents supplied by the mass spectrometer for the mass-to-charge ratio of the gas components provide meaningful information about a vacuum system in the multiple phases of operation, whether for determining the tightness and the absence of contamination after setup or for its characterization when operating a vacuum process. The pressure range which can be achieved in the vacuum system based on the design of the vacuum chamber and pumping system determines the selection of the mass spectrometer with respect to the detector. A Faraday detector is frequently sufficient in high vacuum, while a secondary electron multiplier is necessary in ultra-high vacuum to detect the very low gas densities.

Ametek Inc. - www.ametekpi.com - 150 Freeport Road, Pittsburgh, PA 15238, USA email, Tel. +1 412-828-9040 AMETEK Process Instruments is a worldwide manufacturer of process analyzers and instrumentation. Our engineering and manufacturing activities take place in four North American facilities. We have ten direct sales and service offices in seven countries scattered around the globe as well as a wide network of factory trained manufacturer's representatives, distributors, and service technicians. A Business Unit of the Process & Analytical Instruments division of AMETEK, Inc., we are part of a multinational corporation with over $1 billion (U.S.) in annual revenue.

products: Quadrupole Mass Spectrometers Dycor Quadrupole Mass Spectrometers designed with AMETEK's proprietary Dycor electronics and quadrupole mass filter provide the latest technology for gas analysis. Applications include: residual gas analysis, thin film deposition, reactive sputter control, vacuum furnaces, atmospheric and environmental sampling, gas compositional analysis, and process gas analysis. Dycor Gas Analyzers: Dycor Quadrupole Mass Spectrometers and Residual Gas Analyzers (RGAs), for vacuum residual gas analysis, materials research, and gas compositional analysis. Dycor ProLine Process Mass Spectrometers: Dycor ProLine and ProMaxion process mass spectrometers are designed for the compositional analysis of process gases and process control. These quantitative on-line process analyzers are equipped with all required sample switching and pumping equipment. They are available with a sample handling and conditioning system engineered for your process. Upgrade and Retrofit kits: Search here for information on the availability of upgrade and retrofit kits for discontinued and obsolete analyzers and electronics.

Extorr Inc. - www.extorr.com 307 Columbia Road New Kensington, PA 15068, USA email, Tel. Extorr, Inc. manufactures electronic instruments based on quadrupole mass spectrometer technology. The Company was founded with vacuum measurement products at the center of its business. Its flagship product, the XT residual gas analyzer product line, has a unique competitive position since it can measure both total pressure as well as the partial pressures of gases left in a vacuum system. This product not only takes the place of residual gas analyzers (RGAs), but also a diverse range of instruments required for vacuum measurements at orders of magnitude higher operating range than the traditional RGA.

products: Residual Gas Analyzers Residual Gas Analyzers: Pirani, Ion Gauge, Quadrupole - All Included The Extorr XT residual gas analyzer is a quadrupole mass spectrometer complete with a built-in Pirani gauge and Ion gauge. It is an essential measuring device which may be used in any vacuum system. The Extorr XT residual gas analyzer (RGA) models come in 100, 200 and 300 amu packages. All RGA models attach to a single 2 3/4 inch flange. Each package has automatic start-up and shut down and will constantly monitor from atmospheric pressure to ultra high vacuum. The built-in Pirani gauge and ion gauge constantly monitor total pressure and regulate and protect the RGA. These functions are seamlessly integrated into the Extorr software package.

INFICON Two Technology Place, East Syracuse, NY 13057-9714, USA email, Tel. +1 (315) 434 1100 Employees: 700 ; Manufacturing Facilities: Syracuse, New York; Balzers, Liechtenstein; Cologne, Germany; Aaland Islands, Finland INFICON is a leading developer, manufacturer and supplier of vacuum instrumentation, critical sensor technologies and process control software, with an emphasis on process engineering expertise, for the semiconductor and related industries. These analysis, measurement and control products are vital to original equipment manufacturers (OEMs) and end-users in the complex manufacturing of semiconductors, flat panel displays, magnetic and optical storage media and precision optics. INFICON also provides essential instrumentation for gas leak detection and toxic chemical analysis to the air conditioning / refrigeration, emergency response and industrial hygiene markets.

products: Residual Gas Analyzers INFICON residual gas analyzers (RGA) are used as diagnostic tools to aid process engineers in continuously monitoring the manufacturing process for the presence of contaminant gases and for verifying the presence of desired process gases. The Transpector® Gas Analysis System family of instruments: Transpector® Gas Analyzers provide accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection.

Matco Associates, Inc. - 4640 Campbells Run Road, Pittsburgh, PA 15205, USA email, Toll-Free: 1-800-221-9090 Matco Associates, Inc. is a leading independent consulting, engineering, and testing firm specializing in the fields of failure analysis, inspection, corrosion, metallurgical engineering, cathodic protection systems, materials selection, and coatings.

products: RGA systems Matco Associates' RGA system is a computer software controlled quadrupole mass spectrometer, capable to 200 atomic mass units, with automatic start-up and shut-down, and with a built-in Pirani gauge and ion gauge. The Pirani gauge and ion gauge constantly monitor from atmospheric pressure to ultra high vacuum and regulate and protect the RGA. It is interfaced to a vacuum system consisting of a mechanical pump for roughing and a diffusion pump for high vacuum. The operating range of the vacuum system is 10-5 to 10-6 torr. The gas content can be analyzed from a metered input port. Alternatively, a specially designed internal mechanical attachment allows for the breaking or cutting of the material to be analyzed for out-gassing products in-vacuuo.

Stanford Research Systems, Inc. 1290-D Reamwood Avenue, Sunnyvale, CA 94089, USA email, Tel. +1 (408) 744-9040 Formed in 1980, SRS is a privately held corporation which designs and manufactures high performance test equipment. 1995 SRS moved into the vacuum science market with a line of residual gas analyzers

products: residual gas analyzers The 100, 200 and 300 amu residual gas analyzers from SRS offer exceptional performance and value. These RGA's provide detailed gas analysis of vacuum systems at about half the price of competitive models. Each RGA system comes complete with a quadrupole probe, electronics control unit (ECU), and a real-time Windows software package that is used for data acquisition and analysis, as well as probe control.

ULVAC Technologies, Inc. - 401 Griffin Brook Drive Methuen, MA 01844, USA email, Tel. +1 978 686 7550

products: Residual Gas Analyzers Qulee BGM Series: "Qulee" (pronounced as "KLEE"), ULVAC's latest model for residual gas analysis, as well as utmost simplicity in handling. Many pieces of feedback from facility engineers in various production lines are reflected in the new product. REGA Series: Based on our experience in mass filter type gas analyzers, the REGA is a residual gas monitor with complete functions to satisfy customer. Using residual gas analysis and gas analysis during processing, the REGA is perfect for vacuum quality control for various types of vacuum equipment, such as PVD. The unit is also applicable in research and development and gas analysis of thermal desorption.

 

 

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