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TOYOTA Industries Corporation - www.toyota-industries.com
- 2-1 Toyoda-cho, Kariya-shi, Aichi 448-8671, Japan
email, Tel. +81-566-27-5699
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products:
- T100L (100m3/h down to 0,01 Torr) is an ultra compact and quiet roots dry pump for clean application. It is designed for the integration into semiconductor equipment in the cleanroom.
- T100P (100m3/h down to 0,01 Torr) is excellent performance dry pump for all process including light duty and harsh duty processes. It has good reliability and safety for reactive gases and deposition.
- T1000 (600-950m3/h down to 0,001 Torr) is designed to cover wide range of processes with its high capacity and variable pumping speed. It has good reliability and safety for reactive gases and deposition.
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Keywords
www.vacuum-guide.com
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