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GEA Wiegand vacuum ejectors GEA Process Engineering Limited -
- Ebis South One Bldg. 3F, 1-7-8, Ebisu-minami, Shibuya-ku, 150-0022 Tokyo, Japan

Hiroyuke Yanase , email: hiroyuki.yanase@geagroup.com, Tel. +81 3 5773 8161

GEA Wiegand Representation: GEA Wiegand is a worldwide leading company for process technology.
On 01 January 2009 GEA Wiegand's scope of products with evaporation, distillation and membrane filtration technology has been completed by the product range of the former GEA Jet Pumps GmbH consisting of jet pumps, vacuum systems and gas scrubbers.
products: ejectors and vacuum systems
  • steam jet vacuum pumps, jet pumps
  • vacuum/steam jet cooling plants
  • condensation plants, vacuum degassing plants
  • jet and Venturi scrubbers, evaporation plants.

Pfeiffer Vacuum Japan Hakuto Co. Ltd. - www.hakuto-vacuum.jp
- 1-13, Shinjuku 1-Chome, Shinjuku-Ku, Tokyo 160-8910, Japan

email, Tel. +81-3-3225-8910

Hakuto was founded in November 1953, originally as a trading company who deals with import and re-sale of the crystal ore.
Pfeiffer Vacuum is a vacuum technology world leader for more than 130 years: an important milestone was the invention of the turbopump in our company more than 50 years ago.
Our comprehensive range of solutions, products and services includes vacuum pumps, measurement and analysis equipment, up to complex vacuum systems.
products: vacuum pumps and systems, measurement and analysis equipment, vacuum components

  Rotary vane vacuum pumps, diaphragm pumps, piston vacuum pumps, dry screw pumps

  High vacuum side channel pumps, roots blowers, turbomolecular pumps

  Vacuum measurement, Analysis, Residual Gas Analyser

  Leak detectors, leak detection systems

  Vacuum chambers, vacuum flanges and fittings, hoses, flexible connectors

  Viewports, vacuum valves, feedthoughs, manipulators

Shin-Etsu Chemical Co., Ltd. - www.silicone.jp
- Silicone Division, 6-1, Ohtemachi 2-chome, Chiyoda-ku, Tokyo, 100-0004 Japan

email, Tel. +81-(0)3-3246-5132
products: Diffusion pump fluid, HIVAC F-4 and HIVAC F-5
Methylphenyl silicone fluid, Good oxidation and chemical resistance. 10-7 to 12-12 Torr, high degree vacuum is obtainable.

IRIE KOKEN 真空バルブ IRIE KOKEN CO., Ltd - www.ikc.co.jp
- Kokusai Building 813, 3-1-1 Marunouchi, Chiyoda-ku, Tokyo 100-0005, Japan

email, Tel. +81-3-3211-7111
products: 真空バルブ
  • 角型ゲートバルブ
  • 丸型ゲートバルブ
  • 大型ゲートバルブ(角型)
  • L型バルブ(アングルバルブ)

TAIKO Tokyo Branch Office - www.taiko-kk.com
- MS Bldg.4F,Suidobashi 3-4-9,Misaki-cho,Chiyoda-ku, Tokyo 101-0061, Japan

email, Tel. +81 (3) 3221 8551
products: dry vacuum pumps (screw type)

KNF KNF Japan Co.Ltd.
- Minagawa, Bldg. 5F, 2-4-5, Minamiazabu, 106 Minato-ku, Japan

email, Tel.

PLANSEE Japan Sputter Targets PLANSEE Japan Ltd. - www.plansee.co.jp
- Akasaka Twin Tower, 2-17-22 Akasaka, Minato-ku, Tokyo 107-0052, Japan

email, Tel. +81 3 3568 2451

With its complete in-house manufacturing, extensive expertise in powder metallurgy and special deformation technologies, PLANSEE guarantees the best quality materials for the coating industry. They stand out for their full density, high purity and a uniform and fine grained microstructure.
PLANSEE has established facilities in 16 countries.
products: Sputtering Targets

PLANSEE is a leading supplier of planar and rotary sputtering targets for thin-film solar cells (CIGS, CdTe, CSP), flat panel displays and hard coating. In addition to sputtering targets made of pure molybdenum and tungsten, PLANSEE also offers high quality molybdenum alloys such as MoNa, chromium, and materials for absorber layers, as well as substrates for flexible solar cells. For hard coating PLANSEE delivers all typical OEM target dimensions in many compositions such as TiAl, Ti, TiSi, Cr, TiB2 or binder free WC.

In its in-house application center, PLANSEE sputters and characterizes thin-film materials under real conditions. The laboratory is also available for customers. According to their specifications, PLANSEE sputters test substrates by RF-, DC- or Pulsed-DC-methods and thereby gives decisive information for the further development of coating systems.

Agilent vacuum Agilent Technologies Japan, Ltd - www.agilent.com
- Sumitomo Shibaura Building, 8th Floor, 4-16-36 Shibaura, Minato-ku, Tokyo 108-0023, Japan

email, Tel. +81 (3) 5232 1253

Agilent Vacuum Products Division (VPD), formerly Varian Vacuum, is a global supplier with a complete range of vacuum pumps, leak detectors, components and accessories to create, control, maintain and measure vacuum.
products: Dry Scroll, Ion Pumps, Turbomolecular, Leak detectors

We have always been in the forefront of vacuum technology, setting industry standards from the very beginning with the invention of the ion pump in the late 1950s that made UHV possible. Major developments in diffusion pump and leak detection technology soon followed, with innovations in turbomolecular and dry scroll pumping, up to the most recent revolutionary TwisTorr FS turbo pumps and IDP-series dry scroll pumps.

MoreTec MoreTec Co., Ltd - www.moretec-inc.com
- Dai2 Amemiya Bldg. 8F, 23-5,Higashi-Ueno 6Chome, TaiTou-Ku, Tokyo 110-0015, Japan

email, Tel. +81 03-6231-7890

Development, production, sales for vacuum feedthroughs and magnetic fluid
products: Magnetic Fluid Feedthrough

Under the condition of shaft rotation, a magnetic fluid feedthrough provides a hermetic seal against both vacuum and gas.

BECKER Air Techno Co. Ltd. - 2-27-1 Nakazato, AST-Building 201, Kita-Ku, Tokyo 114-0015, Japan

email, Tel. +81 (3) 3576 5611
products: rotary vane vacuum pumps, oil sealed vacuum pumps

Namiki Precision Jewel Co., Ltd - www.namiki.net
- 8-22,Shinden 3 chome Adachi-ku, Tokyo, 123-8511 Japan

Kuni Shimada, Tel. +81 (03) 5390-7620

In the early 1970's and 1980's, Namiki's precision diamond processing led to major advances in bioscience, semiconductors, coatings, and micron precision work on mechanical components. Today, Namiki is a recognized leader in coreless motors and planetary gearheads, powerful rare earth magnets, micro fans, optical communications components, medical devices and more.
products: diaphragm vacuum pumps
Air pump series 8018Gt: flow rate 2000 ml/mn

Fluoro Mechanic Co., Ltd - www.fluoro.co.jp
- 7-21-1, Hirai Edogawa-ku, Tokyo 132-0035, Japan

email, Tel. +81-3-3618-0368
products: Oil Free Diaphragm Vacuum Pump with HEPA filters (approx. 2.5 ltr/mn) for cleanroom use
Vacuum Wand for Semiconductor Wafer Processing

Nippon BUSCH K.K. - www.busch.co.jp
- Akimoto Bldg.2-17-5, Ohgibashi Koto-ku, Tokyo 135-0011, Japan

email, Tel. +81 (3) 3640 9965
products: Vacuum Technology, Vacuum Pumps & Systems,

V-TEX V-TEX Corporation - www.vtex.co.jp
- 6-28-11 Minami-Ohi, Shinagawa, Tokyo, 140-0013, Japan

email, Tel. +81-3-3765-4161

Incorporated: May, 1949 - Employees: 172
products: HV and UHV Gate Valves
  • Used for many types of apparatus such as etching system and deposition system using vacuum environment
  • Transfer Valves: Used between Chambers or between Atmosphere and Chambers, as Work (e.g. wafer and glass board) goes through opening (port) of the valves.
  • Gate Valves and Pendulum Valves: Used between Chamber and Vacuum Pump. Control Valves are also available.
  • UHV valves and other special Valves: Used for Particle Beam Accelerator, Synchrotron, UHV Chambers and etc.

Kitz KITZ SCT Corporation - www.kitz-sct.jp
- 1-5-1 Omori-Kita, Ota-ku, Tokyo 1430016, Japan

email, Tel. +81-3-6404-2171
products: Vacuum valves
  • Ultra high purity gas valves
  • Ultra high purity gas fittings

EBARA - www.ebara.co.jp
- 11-1, Haneda Asahi-cho, Ohta-ku, Tokyo 144-8510, Japan

email, Tel.

EBARA's rapidly growing Precision Machinery Group creates clean environments that are crucial to the fabrication and processing of semiconductor devices. For domestic and overseas semiconductor manufacturers competing for advances in integration density and yield, the quality of production environments is directly reflected in the quality of the final products. Both from within EBARA and from outside, there is a growing need for the offerings of the Group, which actively pursues technological advances in accordance with the Corporation's environmental philosophy.
Employing ultrahigh-vacuum and ultra-clean technologies, the Precision Machinery Group works proactively to create an idea environmental for sub-micron technology in VLSI device manufacturing. The Group is making rapid progress in diverse areas, from components such as vacuum pumps and gas scrubbers to process equipment such as a chemical mechanical polisher and electroplating.
products: Various vacuum pumps (dry vacuum pumps, turbo-molecular pumps and cryopumps)

Clean ozonizers for semiconductor device fabrication, general-purpose ozonizers, Non-particle pumps, pure-water jet pumps

Shinku Kogaku Manipulator Vacuum and Optical Instruments - www.shinku-kogaku.co.jp
- 2-18-18 Shimomaruko Ohta-ku, Tokyo, Japan 146-0092

email, Tel. +81 03-3756-7082
products: Manipulators

designed to accurately and reproducibly manipulate the vertical and horizontal (X/Y) movement of freezing machine and cryostat in experiments in atmosphere or ultrahigh vacuum environments.

UNOZAWA-GUMI IRON WORKS, Ltd - www.unozawa.co.jp
- 36-40, Shimomaruko, 2-chome, Ohta-ku Tokyo 146-0092, Japan

Head Office and Sales, Tel +81-3-3759-8101

Employees: 170 - After foundation, the Company manufactured steam pump, boiler feed pump and condensate pump, liquid ring vacuum pump reciprocating vacuum pump and pneumatic conveyor, etc. In 1950, the positive displacement blower and vacuum pump (Roots type), which is used with the paper machine, were developed by the Company for the first time in Japan. Unozawa has developed the dry vacuum pump in 1983, which is unparalleled in the world, in advance of other manufacturers. The new pump is exported to various companies in the USA, EC and Asian countries.
products: Dry vacuum pumps (multi-stage Roots type) - Rotary blower (Roots type) - Rotary vacuum pumps (Roots type) - Mechanical booster - Water ring vacuum pump - Pneumatic conveyor - De-aerator - Reciprocating vacuum pump

sev-vacuum Vacs SEV - www.sev-vacuum.com
- 2-23-9 Yaguchi, Ohta, Tokyo, 146-0093 Japan

email, Tel.

Vacs SEV manufactures nickel, copper gaskets and taper seals for high and ultra- high vacuum systems. These products are available from Vacs SEV only.
products: Copper Gaskets for high and ultra- high vacuum
  • Aluminium Gaskets for Aluminium-Alloy CF Flanges
  • Nickel Gaskets for CF Type Flanges (Nickel 201)
  • Taper-Sealing Type OFHC Gaskets for CF Type Flanges



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